| Microwave Plasma |
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| CATEGORIES ABOUT MICROWAVE PLASMA | |
| plasma physics | |
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Microwave-excited Plasma s have two appealing properties: If applied in Surface-wave-sustained Mode , they are especially well suited to generate large-area plasmas of high Plasma Density . In addition, both in Surface-wave and Resonator Mode , they can exhibit a high degree of spatial localisation. This allows to spatially separate the location of plasma generation from the location of surface processing, see Afterglow Plasma . Such a separation, together with an appropriate gas flow scheme, may help reduce the negative effect that particles released from a processed substrate may have on the Plasma Chemistry of the Gas Phase . SEE ALSO [http://jlnlabs.online.fr/plasma/gmrtst/ Generating plasmoid in household microwave oven] |
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