Information AboutZerodur |
| CATEGORIES ABOUT ZERODUR | |
| ceramic materials | |
APPLICATIONS # Optics: Many optical applications such as telescopes, optical cavities etc require a substrate material with a near-zero coefficient of thermal expansion and/or excellent thermal shock resistance. # Microlithography: Zerodur is used as a movable mechanical part in wafer stepper and scanner machines to achieve precise and reproducible wafer positioning. Zerodur is an ideal substrate material for reflective optics in the forthcoming EUV lithography due to its almost zero thermal expansion, outstanding homogeneity and good processing behavior. # Measurement Technology: The extremely low thermal expansion and proven long-term dimensional stability of Zerodur make it an ideal reference standard for measurement instruments. ZERODUR CONSTANTS HTTP://WWW.MELLESGRIOT.COM/PRODUCTS/OPTICS/MP_3_6.HTM
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