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Mass Flow Controller




A mass flow controller ('''MFC''') is used to measure and control the flow of Gas ses. A mass flow controller is designed and calibrated to control a specific type of gas at a particular flow rate. The MFC can be given a set point (from 0 to 100%) of its full scale range. The device will then ensure the gas is flowing at the specified rate. MFCs can be either Analog or Digital , a digital flow controller is usually able to control more than one type of gas whereas an analog controller is limited to a single gas at a single range.

All mass flow controllers have an inlet valve, an outlet valve, and a control port. The control port is where a signal of some type is sent to the controller which directs it to set the flow rate to a certain amount. The flow rate is specified as a percentage of its calibrated full scale flow.


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