Mask Data Preparation Article Index for
Mask
Website Links For
Mask
 

Information About

Mask Data Preparation




Although previously a simple translation task, the changes
required for Resolution Enhancement Technologies (RET) can create huge data volume problems for the mask writer, so some care must be applied
to mitigate these negative effects.


REFERENCES


  • ''Electronic Design Automation For Integrated Circuits Handbook'', by Lavagno, Martin, and Scheffer, ISBN 0849330963 A survey of the field, from which this summary was derived, with permission.